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Books : X-Ray Metrology in Semiconductor ManufacturingIn association with Amazon.com List Price: $139.95 Amazon.com's Price: $120.16 You Save: $19.79 (14%)Prices subject to change. Availability: Usually ships in 24 hours
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Binding: HardcoverDewey Decimal Number: 621.38152 EAN: 9780849339288 ISBN: 0849339286 Label: CRC Manufacturer: CRC Number Of Items: 1 Number Of Pages: 296 Publication Date: January 24, 2006 Publisher: CRC Studio: CRC Sales Rank: 1708149 Accessories:
Editorial Review: Product Description: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput. Browse for similar items by category:
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